【时  间】2025年1月8日（周三）下午14:30

【地  点】量子院526报告厅

【主  持】刘玉龙副研究员 量子计算云平台-LTF团队

【题  目】Fabrication and parametric pumping analysis of silicon nitride membrane nanoelectromechanical resonator

【摘  要】Silicon nitride thin films, due to low optical loss and high tensile stress, have drawn much attention for mechanical resonators, such as beams and membranes that are good candidates used for sensing zeptonewton force, femtogram mass, and picometer motion. In recent years, capacitive transduction scheme plays a more and more important role in the applications of membrane-based MEMS resonators, thanks to membrane resonators having 10-times larger coupling strength than the doubly clamped beam resonator.

Here, we present silicon nitride membrane nanoelectromechanical resonator, containing a silicon nitride membrane covered with a thin aluminium film, which is capacitively coupled to external circuits by an aluminium suspended top gate. Using RF ac signals to excite/detect this membrane resonator, we demonstrate parametric amplification and de-amplification of the input signals by utilizing this suspended top gate. The phase-sensitive amplification has also been analyzed. This silicon nitride membrane resonator offers the possibility for exploring membrane based nanoelectromechanical resonator that can be efficiently integrated into large-scale electrical circuits.

【报告人简介】

Hao Xu (徐 浩) is now serving as a Postdoctoral researcher in the Department of Electronic Engineering, Tsinghua University. Before coming here, he received his PhD degree majoring in Micro and Nanoelectronics in January 2024 at the Institute for Electronics, Microelectronics and Nanotechnology (IEMN), CNRS/Univ. Lille, France. During his PhD study, his research focus is mainly on MEMS and NEMS devices, which are utilized for various applications, such as force or mass sensors, and thermometry.